Adiabatic mode-profile conversion by selective oxidation for photonic integrated circuit
Patent No. 9,036,968
Issued: May 19, 2015
Gubenko; Alexey (Dortmund, DE), Krestnikov; Igor (Dortmund, DE), Mikhrin;
Sergey (Dortmund, DE), Livshits; Daniil (Dortmund, DE), Wojcik; Greg (Santa
Clara, CA), Kovsh; Alexey (Munich, DE)
Waveguide designs and fabrication methods provide adiabatic waveguide eigen mode conversion and can be applied to monolithic vertical integration of active and passive elements in PICs. An advantage of the designs and methods is a simple fabrication procedure with only a single etching step in combination with subsequent well-controllable selective oxidation. As a result, improved manufacturability and reliability can be achieved.
Reference to Related Applications
This application claims one or more inventions which were disclosed in Provisional Application No. 61/507,233, filed Jul. 13, 2011, entitled "Adiabatic Mode-Profile Conversion by Selective Oxidation For Photonic Integrated Circuit". The benefit under 35 USC 119(e) of the United States provisional application is hereby claimed, and the aforementioned application is hereby incorporated herein by reference.
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