Method and apparatus for rapid preparation of multiple specimens for transmission electron microscopy

Patent No. 8,258,473

Issued: September 4, 2012
Filed: March 17, 2011

Inventors: Shaapur; Frederick F. (Scottsdale, AZ), Graham; Roger J. (Scottsdale, AZ)
Assignee: Nanotem, Inc. (Scottsdale, AZ)


A method and apparatus for in-situ lift-out rapid preparation of TEM samples. The invention uses adhesives and/or spring-loaded locking-clips in order to place multiple TEM-ready sample membranes on a single TEM support grid and eliminates the use of standard FIB-assisted metal deposition as a bonding scheme. Therefore, the invention circumvents the problem of sputtering from metal deposition steps and also increases overall productivity by allowing for multiple samples to be produced without opening the FIB/SEM vacuum chamber.

Reference to Related Applications

This application claims one or more inventions which were disclosed in Provisional Application No. 61/413,083, filed Nov. 12, 2010, entitled "METHOD AND APPARATUS FOR RAPID PREPARATION OF MULTIPLE SPECIMENS FOR TRANSMISSION ELECTRON MICROSCOPY". The benefit under 35 USC 119(e) of the United States provisional application is hereby claimed, and the aforementioned application is hereby incorporated herein by reference.


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